RTA - Rapid Thermal Annealing System
- Company Name:ForALL
- Membership:Free Member
- Member Since:2007. 12.06
- Country/Region:Korea
- City:Daejeon
- Contact:Sang-jin Ahn
- Related Keywords:RTA, Rapid Thermal Annealing System, Machinery
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ForALL
[Korea]
FA-RTP can be profit for the processes that require minimization of process time and thermal buggets of substrated such as thin gate oxidation, rapid annealing of deposited film, etc.
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