MAGMA - E-beam & Thermal Evaporation System

MAGMA provides customer with a high quality & reliable thin film deposition.
It also offers low risk manufacturing solutions, high profit via high productivity to customer.

Application

• Mainly, IR cut off filter for mobile phone & digital camera, Anti-Reflector for glass and color filter, beam splitter, half-mirrors, decorative coatings, high reflectance coatings, single / multi-layer thin film, conductive metal coatings
  - Au, AI, Ni, Ti, semiconductor - MMIC, HIC for researching and development

Technology

• RF ion-beam assist for superior quality of deposition
  
• Twin e-beam source for high productivity
  
• Easy-to-maintain design of planetary motion substrate holder
  
• Specially designed uniformity mask technology
  
• System is tested under industry conditions for trouble-free,
  long term operation